Integration of scanning tunneling microscope nanolithography and electronics device processing

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 10, Issue 4, 1992, Pages 2105-2113

  Dobisz, E A ^b   Tseng, W ^a   Bennett, J ^a   Schneir, J ^a   Harary, H H ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 21144474421     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.577990     Document Type: Conference Paper

References (13)

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12. I.-W. Lyo and Ph. Avouris, Science 253, 173 (1991), and references therein.
13. E. A. Dobisz and J. A. Dagata (unpublished).