DEVELOPMENT OF A LATCHING VALVE FOR MICRO-CHEM-LAB™

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 1999-W, Issue , 1999, Pages 427-434

  Wong, C Channy ^a   Adkins, Douglas R ^a   Manginell, Ronald P ^a   Frye Mason, Gregory C ^a   Hesketh, Peter J ^b   Stanczyk, Thomas ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b UNIVERSITY OF ILLINOIS AT CHICAGO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL DETECTION; ELECTRIC POWER UTILIZATION; GASES; MAGNETISM;

CHEMICAL AGENT; COUNTER TERRORISM; CRITICAL COMPONENT; GAS PHASE DETECTION; INTEGRATED MICROSYSTEMS; LIQUID AND GAS PHASIS; LIQUID-PHASE DETECTIONS; MAGNETIC ACTUATION; MODE OF OPERATIONS; PERFORMANCE;

SIGNAL DETECTION;

EID: 1542592030     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE1999-0301     Document Type: Conference Paper

References (11)

1. Arnold, D. W., et al., 1998, “Microseparation and Microfluidic Studies,” Proceedings, 3'^'' International Symposium on Micro Total Analysis System, Banff, Alberta, Canada, pp. 435-436.
2. Ballantine, D. S., White, R. M., Martin, S. J., Ricco, A.J., Zellers, E. T, Frye, G. C., 1997, Acoustic Wave Sensors: Theory, Design, and Physico-Chemical Applications, Academic Press, Inc., San Diego, CA.
3. Fraden, J., 1997, Handbook of Modem Sensors: Physics, Design, and Applications, 2“* edition, American Institute of Physics Press, Woodbury, NY, pp. 64-71.
4. Frye-Mason, G. C., Kottenstette, R. J., Heller, E. J., Matzke, C. M., Casalnuovo, S. A., Lewis, P. R., Manginell, R. P., Schubert, W. K., Hietala, V. M., 1998, “Integrated Chemical Analysis Systems for Gas Phase CW Agent Detection,” Proceedings, S”' International Symposium on Micro Total Analysis System, Banff, Alberta, Canada, pp. 477-478.
5. Fujimasa, I., 1996, Micromachines: a New Era in Mechanical Engineering, Oxford University Press, New York, NY, pp. 48-57.
6. Fujita, H., and Gabriel, K. J., 1991, “New Opportunities for Micro Actuators,” Proceedings, 6'* International Conference on Solid-State Sensors and Actuators (Transducers'91), San Francisco, CA, pp. 14-20.
7. Madou, M., 1997, Fundamentals of Microfabrication, CRC Press, Boca Raton, FL, pp. 406-472.
8. Manginell, R. P., Frye-Mason, G. C., Schubert, W. K., Shul, R. J., and Willison, C. G., 1998, “Microfabrication of Membrane-Based Devices by HARSE and Combined HARSE/Wet Etching,” Proceedings, SPIE Conference on Micromachining and Microfabrication Process Technology IV, Santa Clara, CA, Vol. 3511, pp. 269-276.
9. Matzke, C. M., Kottenstette, R. J., Casalnuovo, S. A., Frye-Mason, G. C., Hudson, M. L., Sasaki, D. Y., Manginell, R. P., and Wong, C. C., 1998, “Microfabricated Silicon Gas Chromatographic Micro-Channels: Fabrication and Performance,” Proceedings, SPIE Conference on Micromachining and Microfabrication Process Technology IV, Santa Clara, CA, Vol. 3511, pp. 262-268.
10. Melcher, J. R., 1981, Continuum Electromechanics, MIT Press, Cambridge, MA, pp. 6.1-6.39.
11. Spivack, M. A., 1970, “Parylene Thin Films for Radiation Applications,” Review of Scientific Instruments, Vol. 41, No. 11, pp. 1614-1616.