Microfabrication of membrane-based devices by HARSE and combined HARSE/wet etching

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3511, Issue , 1998, Pages 269-276

  Manginell, Ronald P ^a   Frye Mason, Gregory C ^a   Schubert, W Kent ^a   Shul, Randy J ^a   Willison, Christi G ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Combined HARSE wet etching; Composite membrane; DRIE; Flow sensor; FPW; HARSE; Microhotplate; Valve

Indexed keywords

ACTUATORS; ANISOTROPY; CMOS INTEGRATED CIRCUITS; DIELECTRIC FILMS; REACTIVE ION ETCHING; SENSORS; SILICA; SILICON NITRIDE; SILICON WAFERS; VALVES (MECHANICAL);

DIELECTRIC MEMBRANES; FLOW SENSOR; HIGH ASPECT RATIO SILICON ETCHING; MICROFABRICATION; MICROHOTPLATES; WET ETCHING;

MICROELECTRONIC PROCESSING;

EID: 0038336237     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.324310     Document Type: Conference Paper

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