Micropump design for optimum pressure/flow characteristics

American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)

Volumn 3, Issue , 2001, Pages 647-655

  Williams, Brian E ^a   Forster, Fred K ^a  

^a University of Washington   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROPUMPS; PIEZOELECTRIC ACTUATION;

ACTUATORS; ALGORITHMS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; PIEZOELECTRIC DEVICES; RESONANCE; REYNOLDS NUMBER; THERMAL EXPANSION; VALVES (MECHANICAL);

RECIPROCATING PUMPS;

EID: 1542537575     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

1. R. Bardell, R. Sharma, F. K. Forster, M. A. Afromowitz, and R. Penney. Designing high-performance micro-pumps based on no-moving-parts valves. In L. Lin, K. E. Goodson, et al., editors, Micro-Electro-Mechanical Systems (MEMS), ASME International Mechanical Engineering Congress and Exposition (Dallas), volume DSC-234/HTD-354, pages 47-53, New York, November 16-21 1997. ASME.
2. F. Forster, R. Bardell, M. Afromowitz, and N. Sharma. Design, fabrication and testing of fixed-valve micropumps. In D. C. Wiggert et al., editors, Proceedings of the ASME Fluids Engineering Division, ASME International Mechanical Engineering Congress and Exposition (San Francisco), volume 234, pages 39-44, New York, November 12-17 1995. ASME.
3. F. K. Forster, R. L. Bardell, A. P. Blanchard, M. A. Afromowitz, and N. R. Sharma. Micropumps with fixed valves. U. S. Patent No. 5,876,187, March 2 1999.
4. F. K. Forster, R. L. Bardell, and N. R. Sharma. Method for making micropumps. U. S. Patent No. 6,227,809, May 8 2001.
5. C. J. Morris. Parameter determination for low-order models of a fixed-valve micropump. Master's thesis, University of Washington, Seattle, 2000.
6. C. J. Morris and F. K. Forster. The correct treatment of harmonic pressure-flow behavior in microchannels. In Micro-Electro-Mechanical Systems (MEMS), ASME International Mechanical Engineering Congress and Exposition (Orlando), volume MEMS-2, pages 473-479, New York, Nov. 5-10 2000. ASME.
7. C. J. Morris and F. K. Forster. Optimization of a circular piezoelectric bimorph for a micropump driver. J. Micromech. Microeng., 10(3):459-465, 2000.
8. A. Olsson, G. Stemme, and E. Stemme. A numerical design study of the valveless diffuser pump using a lumped-mass model. J. Micromech. Microeng., 9:34-44, 1999.
9. D. Rowell and D. N. Wormley. System Dynamics: An Introduction. Prentice Hall, Upper Saddel River, 1997.
10. A. Ullmann. The piezoelectric valve-less pump-performance enhancement analysis. Sensors and Actuators A (Physical), A 69:97-105, 1998.
11. R. Zengerle and R. Martin. Simulation of microfluid systems. J. Micromech. Microeng., 4:192-204, 1994.