Development of an ejector-driven micro-vacuum pump

ASME International Mechanical Engineering Congress and Exposition, Proceedings

Volumn 2, Issue , 2001, Pages 3059-3066

  Wong, C Channy ^a   Aeschliman, Daniel P ^a   Henfling, John F ^a   Sniegowski, Jeffry J ^a   Rodgers, M Steve ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

MEMS; Micro fluidics; Micro pump; Microsystem

Indexed keywords

AIR ENTRAINMENT; BOUNDARY LAYER FLOW; CHANNEL FLOW; COMPUTER SIMULATION; DIFFUSION; DRAG; EJECTORS (PUMPS); FLUIDIC DEVICES; GAS DYNAMICS; HARDWARE; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; PRESSURE EFFECTS; REACTIVE ION ETCHING; SEALS; VALVES (MECHANICAL);

MEMS; MICROFLUIDICS; MICROPUMPS; MICROSYSTEMS;

VACUUM PUMPS;

EID: 1542516304     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)

1. Angell, J.B., Terry, S.C., Barth, P.W., 1983, "Silicon Micromechanical Device," Scientific American, April issue, pp. 44-55.
2. Madou, M., 1997, "Fundamentals of Microfabrication," CRC Press, Boca Raton, Florida.
3. Harrison, D.J., Van Den Berg, A., edited, 1998, "Micro Total Analysis System 1998," μ-TAS 1998 Workshop, Banff, Canada.
4. Nathansonn, H.C., Liberman, I., Freidhoff, C., 1995, "Novel Functionality Using Micro-Gaseous Devices," Proceedings, IEEE MEMS 1995, pp. 72-76.
5. Taylor, S., 1999, "Quadrupole Mass Spectrometry using MEMS," Proceedings, American Vacuum Society 46th International Symposium, Seattle, Washington, pp. 198.
6. Frye-Mason, G. C., et al, 2000, "Hand-Held Miniature Chemical Analysis System for Detection of Trace Concentrations of Gas Phase Analytes", Proceedings, Micro Total Analysis Systems 2000, Kluwer Academic Publishers, Dordrecht, Netherlands, pp. 229-232.
7. Weed, J.W., 1999, "The Road to Miniaturizing Vacuum Pumps," Invited Talk, Workshop on Harsh-Environment Mass Spectrometers, University of South Florida, St. Petersburg, Florida.
8. Weed, J.W., 2000, "Miniature Vacuum Pumps," Proceedings, American Vacuum Society 47th International Symposium, Boston, Massachusetts, pp. 204.
9. Piltingsrud, H.V., 1996, "Miniature Peristaltic Vacuum Pump for Use in Portable Instruments," J. of Vacuum Science & Technology A, Vol. 14, No. 4, pp. 2610-2617.
10. Vargo, S.E., Green, A.A., Muntz, E.P., 2000, "Heat Transfer Implications in the 1st MEMS Fabricated Thermal Transpiration-Driven Vacuum Pump for Gases," ASME HTD-Vol.366-2, Proceedings, ASME 2000 IMECE, Heat Transfer Conference, Vol. 2, Orlando, Florida, pp. 307-314.
11. Wilcox, J.Z., Feldman, J., George, T., 1999, "Miniaturizing an Ultra-High Vacuum Orbitron Pump," Proceedings, American Vacuum Society 46th International Symposium, Seattle, Washington, pp. 198.
12. Wiberg, D.V., 1999, "Piezo Driven Peristaltic Pump," JPL, Pasadena, CA, private communication.
13. LEYBOLD AG, 1994, "Vacuum Technology: It's Foundations, Formulae and Tables," Technical Brochure.
14. Tompkins, H.G., 1991, "Pumps Used in Vacuum Technology," AVS Monograph Series, American Vacuum Society, New York, NY.
15. nd edition, BHRA Fluid Engineering, Cheltenham, United Kingdom.
16. Wong, C.C., Adkins, D.R., Manginell, R.P., Frye-Mason, G.C., Hesketh, P.J., Stanczyk, T., 1999, "Development of a Latching Valve for Micro-Chem-Lab," ASME MEMS-Vol. 1, Proceedings, ASME 1999 IMECE, Microfluidics Symposium, Nashville, Tennessee, pp. 427-434.
17. Esahi, M., et al., 1989, "Normally Closed Microvalve and Micropump Fabricated on a Silicon Wafer," Sensors and Actuators, Vol. 20, pp. 163-169.
18. Folta, J.A., et al., 1992, "Design, Fabrication, and Testing of a Miniature Peristaltic Membrane Pump," Proceedings, IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 22-25, pp. 186-189.
19. Emanuel, G., 1976, "Optimum Performance for a Single-Stage Gaseous Ejector," AIAA Journal, Vol. 14, No. 9, pp. 1292-1296.
20. Segars, R.A., Hoge, H.J., 1944, "Some Effects of Jet Compressor Geometry on Efficiency: Compression-Ratio Curves with Two Maxima," Army Natick Labs, Technical Report, PR-10.