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ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 2000-T, Issue , 2000, Pages 307-314

Heat transfer implications in the first mems fabricated thermal transpiration-driven vacuum pump for gases

(3) Vargo, Stephen E a Green, Amanda A a Muntz, E P b

a CALIFORNIA INSTITUTE OF TECHNOLOGY (United States)

b University of Southern California ^* (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AEROGELS; COMPRESSIBILITY OF GASES; FABRICATION; GAS DYNAMICS; GAS TURBINES; MEMS; NASA; POROUS MATERIALS; REACTIVE ION ETCHING; TRANSPIRATION;

COMMERCIAL INSTRUMENTS; GAS-DYNAMIC PHENOMENON; INTEGRATION REQUIREMENTS; KNUDSEN COMPRESSOR; POWER REQUIREMENT; RAREFIED GAS DYNAMICS; SPACE MISSIONS; STRINGENTS; THERMAL TRANSPIRATION; VACUUM CONDITION;

ELECTROMECHANICAL DEVICES;

EID: 85119872032 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: 10.1115/IMECE2000-1449 Document Type: Conference Paper

Times cited : (1)

References (7)

1
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- Ph.D. thesis, Univ. of Southern California
- Vargo, S. E., 2000, "The Development of the MEMS Knudsen Compressor as a Low Power Vacuum Pump for Portable and In Situ Instruments," Ph.D. thesis, Univ. of Southern California.
- (2000) The Development of the MEMS Knudsen Compressor as a Low Power Vacuum Pump for Portable and In Situ Instruments
- Vargo, S. E.¹

2
- 0347736821
- A Simple Micromechanical Compressor and Vacuum Pump for Flow Control and Other Distributed Applications
- AIAA-96-0310, Reno, NV
- Vargo, S. E. and Muntz, E. P., 1996, "A Simple Micromechanical Compressor and Vacuum Pump for Flow Control and Other Distributed Applications," American Institute of Aeronautics and Astronautics, 34th Aerospace Sciences Conf, AIAA-96-0310, Reno, NV.
- (1996) American Institute of Aeronautics and Astronautics, 34th Aerospace Sciences Conf
- Vargo, S. E.¹ Muntz, E. P.²

3
- 0008187740
- An Evaluation of a Multiple-Stage Micromechanical Knudsen Compressor and Vacuum Pump
- C. Shen, ed., Peking University Press, Beijing, China
- Vargo, S. E. and Muntz, E. P., 1996, "An Evaluation of a Multiple-Stage Micromechanical Knudsen Compressor and Vacuum Pump," 20th International Symposium on Rarefied Gas Dynamics, C. Shen, ed., Peking University Press, Beijing, China, pp. 995-1000.
- (1996) 20th International Symposium on Rarefied Gas Dynamics , pp. 995-1000
- Vargo, S. E.¹ Muntz, E. P.²

4
- 85119870590
- Silica Aerogels-Thermal Properties, website last updated May 5, 1999
- Silica Aerogels-Thermal Properties, 1999, website http://eande.lbl.gov/ECS/Aerogels/satcond.htm/, last updated May 5, 1999.
- (1999)

5
- 0346136022
- Structural Analysis of Silica Aerogels
- Hua, D. W., Anderson, J., Di Gregorio, J, Smith, D. M. and Beaucage, G., 1995, "Structural Analysis of Silica Aerogels," J. Non-Crystalline Solids, 186, pp. 142-148.
- (1995) J. Non-Crystalline Solids , vol.186 , pp. 142-148
- Hua, D. W.¹ Anderson, J.² Di Gregorio, J³ Smith, D. M.⁴ Beaucage, G.⁵

6
- 0009851368
- Allyn and Bacon, Boston, MA
- Haberman, W. L. and John, J. E. A., 1989, Engineering Thermodynamics-with Heat Transfer, Allyn and Bacon, Boston, MA.
- (1989) Engineering Thermodynamics-with Heat Transfer
- Haberman, W. L.¹ John, J. E. A.²

7
- 0004171924
- ed., John Wiley & Sons, Inc., New York
- Sze, S. M. ed., 1994, Semiconductor Sensors, John Wiley & Sons, Inc., New York
- (1994) Semiconductor Sensors
- Sze, S. M.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.