Constrained Layer Damping Treatments for Microstructures

American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)

Volumn 3, Issue , 2001, Pages 807-812

  Hsu, Yi Chu ^a   Shen, I Y ^a  

^a University of Washington   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONSTRAINED LAYER TREATMENTS (CLT); DOPPLER VIBROMETERS;

DAMPING; DOPPLER EFFECT; FINITE ELEMENT METHOD; MICROMACHINING; MICROSTRUCTURE; PHOTORESISTS; RESONANCE; SENSORS; SILICON; THIN FILMS; VISCOELASTICITY;

MICROELECTROMECHANICAL DEVICES;

EID: 1542432742     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

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