Nanotectonics: Direct Fabrication of All-Inorganic Logic Elements and Micro-Electro-Mechanical Systems from Nanoparticle Precursors

Materials Research Society Symposium - Proceedings

Volumn 769, Issue , 2003, Pages 247-252

  Wilhelm, Eric J ^a   Jacobson, Joseph ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ETCHING; INK; INTERFACIAL ENERGY; MELTING; PRINTING; SEMICONDUCTOR DEVICES; SINTERING; THERMAL EFFECTS; THIN FILMS; VACUUM APPLICATIONS;

INORGANIC NANOPARTICLES; PLANARIZATION;

NANOSTRUCTURED MATERIALS;

EID: 1542364423     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-769-h8.1     Document Type: Conference Paper

References (5)

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2. Fuller, S. B., E. J. Wilhelm, et al. (2002). "Ink-jet printed nanoparticle microelectromechanical systems." Journal of Microelectromechanical Systems 11(1): 54-60.
3. Bulthaup, C. A., E. J. Wilhelm, et al. (2001 ). "All-additive fabrication of inorganic logic elements by liquid embossing." Applied Physics Letters 79(10): 1525-1527.
4. Xia, Y. N. and G. M. Whitesides (1998). "Soft lithography." Annual Review of Materials Science 28: 153-184.
5. Hayashi, C. (1987). "Ultrafine Particles." Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films 5(4): 1375-1384.