Pressure sensor based on distributed temperature sensing

Proceedings of IEEE Sensors

Volumn 1, Issue 2, 2002, Pages 964-968

  Van Baar, J J ^a   Wiegerink, R J ^a   Berenschot, J W ^a   Lammerink, T S J ^a   Krijnen, G J M ^a   Elwenspoek, M ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Distributed; Mechanical; Pirani; Pressure; Sensing; Temperature; Thermal

Indexed keywords

ATMOSPHERIC PRESSURE; HEAT SINKS; HEAT TRANSFER; HIGH TEMPERATURE EFFECTS; READOUT SYSTEMS; TEMPERATURE DISTRIBUTION; THERMAL CONDUCTIVITY;

DISTRIBUTED; MECHANICAL; PIRANI; SENSING; THERMAL;

SENSORS;

EID: 1542361321     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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