Micro Torque Measurement Using Outer-Rotor Polysilicon Micromotors

Proceedings of IEEE Sensors

Volumn 1, Issue 2, 2002, Pages 1751-1756

  Stark, Kevin C ^a   Yasseen, A Azzam ^b   Phillips, Stephen M ^c   Mehregany, Mehran ^c  

^a NineSigma Inc   (United States)

^b Orchid Cellmark   (United States)

^c CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

Micro torque; Micromotor; Polysilicon actuator

Indexed keywords

CHEMICAL VAPOR DEPOSITION; MICROMACHINING; POLYSILICON; REACTIVE ION ETCHING; ROTORS; SCANNING ELECTRON MICROSCOPY; TORQUE MEASUREMENT;

MICRO TORQUE MEASUREMENT; MICROMOTORS; POLYSILICON ACTUATORS;

ELECTROSTATIC ACTUATORS;

EID: 1542360818     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

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