Visualisation of Electrically Active Areas Using Electron Holography

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn , Issue , 2002, Pages 39-45

  Muehle, U ^a   Lenk, A ^b   Lehmann, M ^b   Lichte, H ^b  

^a INFINEON TECHNOLOGIES AG   (Germany)

^b DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; ANNEALING; CAMERAS; CAPACITANCE; CHARGE COUPLED DEVICES; FIELD EFFECT TRANSISTORS; FOURIER OPTICS; FOURIER TRANSFORMS; LENSES; OPTICAL RESOLVING POWER; SEMICONDUCTOR DOPING; SIGNAL TO NOISE RATIO; TRANSMISSION ELECTRON MICROSCOPY; VACUUM; VISUALIZATION;

ELECTRON WAVES; FOCUSED ION BEAMS (FIB); PHASE DIFFERENCE;

ELECTRON HOLOGRAPHY;

EID: 1542360480     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)

1. Y. El Mansey, VLSI-Symposium and Silicon Technology Honolulu, 2000
2. th International Symposium on the Physical and Failure Analysis of Integrated Circuits IPFA, Singapore, 7-12, 1999
3. C. Spinella, V Raineri, M. Saggio, V. Privitera, S. U. Campasino, Nucl. Instr. a. Meth. i. Phys. Res., B96, 139-143 (1995)
4. H. Cerva, J. Vac. Sci. Technol:, B10, 491-495 (1992)
5. T. Trenkler, P. De Wolf, J. Snauwaert, W. Vandervorst, L. Hellemans, J. Vac. Sci. Technol., B16, 355 (1996)
6. W. D. Rau, P. Schwander, F. H. Baumann, W. Höppner, A. Ourmazd, Phys. Rev. Lett., 82, 2614-2617 (1999)
7. J.F. Walker, European FIB Users Group Meeting at ESREF, 1998
8. A. Tonomura, L. F. Allard, G. Pozzi, D. C. Joy, Y. A. Ono (Editors), Electron Holography, Elsevier Science B. V. (1995) 69-79
9. A. C. Twichett, R. E. Dunin-Borkowski, P.A. Midgley, Phys. Rev. Lett., 88, (2002)
10. H. Bethge, J. Heydenreich (Editors), Electron Microscopy in Solid State Physics, Elsevier Amsterdam, 1987
11. G. Moellenstedt, H. Dueker, Zeitschr. f. Physik, 26, 377-397 (1956)
12. W.D. Rau, H. Lichte, E. Voelkl, U. Weierstall, Jour. Comp.-Aid. Microscopy, 3, 51-63 (2001)
13. A. Lenk, Diploma Thesis, TU Dresden, 2001
14. G. Auvert, European FIB Users Group Meeting at ESREF, 1998
15. B. Schwalbe, Diploma Thesis, TU Dresden, 1997
16. www.triebenberg.de
17. A. Lenk, H. Lichte, U. Muehle, 3 Countries Conference on Electron Microscopy Innsbruck, 2001
18. Z. Wang, K. Sasaki, N. Kato, K. Urata, T. Hirayama, H. Saka, Jour. Electron Microsc., 50, 479-484 (2001)