A novel love mode device with nanocrystalline ZnO film for gas sensing applications

Proceedings of the IEEE Conference on Nanotechnology

Volumn 2001-January, Issue , 2001, Pages 556-561

  Kalantar Zadeh, Kourosh ^a,b   Trinchi, Adrian ^a,b   Wlodarski, Wojtek ^a,b   Holland, Anthony ^a   Atashbar, Massood Z ^c  

^a RMIT UNIVERSITY   (Australia)

^b CRCfor Microtechnology ^*  (Australia)

^c Parkview Campus   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; CRYSTAL STRUCTURE; ELECTROMECHANICAL COUPLING; ELECTROMECHANICAL DEVICES; GAS DETECTORS; GASES; NANOCRYSTALS; NANOSENSORS; NANOTECHNOLOGY; ZINC OXIDE;

ELECTROMECHANICAL COUPLING COEFFICIENTS; GAS SENSING APPLICATIONS; HIGHLY STABLES; NANOCRYSTALLINE ZNO; NOVEL SURFACES; OXYGEN CONCENTRATIONS; SENSITIVE FILMS; ST-CUT QUARTZ;

NITROGEN;

EID: 84949209885     PISSN: 19449399     EISSN: 19449380     Source Type: Conference Proceeding    
DOI: 10.1109/NANO.2001.966484     Document Type: Conference Paper

References (15)

1. F. C. M. Van De Pol, "Thin-Film ZnO - Properties and Applications", Ceramic Bulletin, vol. 69:1959-1965, 1990.
2. 2O on ZnO", Sensors and Actuators, 5:75-88, 1984.
3. F. S. Hickernell, "Zinc Oxide Films for Acoustoelectric Device Applications", IEEE Transactions on Sonics and Ultrasonics, Vol. SU-32:621-629, 1985.
4. H. Wohltjen and R. Dessy, "Surface Acoustic Wave Probe for Chemical Analysis I: Introduction and Instrument Design", Anal. Chem., vol. 51:1458-1475, 1979.
5. C. Caliendo, P. Verardi, E. Verona, A. D'Amico, C. Di Natale, G. Saggio, M. Serafini, R. Paolesse, and S. E. Huq, "Advances in SAW-Based Gas Sensors", Smart Mater. Struct. 6:689-699, 1997.
6. J. Du, G. L. Harding, J. A. Ogilvy, P. R. Dencher, M. Lake, A Study of Love-Wave Acoustic Sensors", Sensors and Actuators A, 56:211-219, 1996.
7. B. Drafts, "Acoustic Wave Technology Sensors", IEEE Trans. On Microwave Theory and Tech., 49:795-802, 2001.
8. B. Jakoby, M. J. Vellekoop, Analysis and Optimization of Love Wave Liquid Sensors", IEEE Trans. Ultrasonics, Ferroelectr. Freq. Control, 45:1293-1301, 1998.
9. I. Esteban, C. Dejous, D. Rebiere, J. Pistre, R. Planade, and J. F. Lipskier", Mass Sesnitivity of SH-AMP Sensors: Potentialities for Organophosphorous Vapors Detection", Sensors and Actuators B, 68:244-248, 2000.
10. K. Kalantar-zadeh, W. Wlodarski, and K. Galatsis, "Love Mode Layered Surface Acoustic Wave Filters", Electronics Letters, 37(12):802-803, 2001.
11. R. Lee, J. F. Vetelino, R. S. Falconer, and Z. Xu, "Macroscopic Theory of Surface Acoustic Wave Gas Microsensors", proceedings of 1988 IEEE Ultrasonics Symposium, pp. 585-589, October 1988.
12. A. A. Oliner (ed.), Topics in Applied Physics: Acoustic, Surface Waves, Springer-Verlag, New York, 1978.
13. U. Wolf, F. L. Dickert, G. K. Fischrauer, W. Greibl, and C. C. W. Ruppel, "SAW Sensors for Harsh Environments", IEEE Sensors Journal, 1(1):4-13, 2001.
14. J. Janata, Principles of Chemical Sensors, Plenum Publishing Co., 1991.
15. V. E. Henrich, and P. A. Cox, The Surface Science of Metal Oxides, Cambridge, University Press, 1994.