Fabrication of Poly-germanium based Thermopiles on Plastic

Proceedings of IEEE Sensors

Volumn 1, Issue 1, 2002, Pages 594-597

  Moradi, M ^b   Moafi, A ^b   Mohajerzadeh, S ^a   Naeli, K ^a  

^a UNIVERSITY OF TEHRAN   (Iran)

^b ISLAMIC AZAD UNIVERSITY   (Iran)

Author keywords

Flexible substrates; Ge thermocouples; Micro machining; PET etching; Ultra violet illumination

Indexed keywords

ANNEALING; COATING TECHNIQUES; DEPOSITION; ETCHING; EVAPORATION; GERMANIUM; GLASS; MICROMACHINING; POLYCRYSTALLINE MATERIALS; POLYETHYLENE TEREPHTHALATES; RUBBER; SCANNING ELECTRON MICROSCOPY; THERMOPILES; ULTRAVIOLET RADIATION; X RAY DIFFRACTION ANALYSIS;

FLEXIBLE SUBSTRATES; GE-THERMOCOUPLES; PET ETCHING; ULTRA-VIOLET ILLUMINATION;

THERMOCOUPLES;

EID: 1542331628     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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