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Volumn , Issue , 2001, Pages 285-288

Various Focused Ion Beam Microsurgery Techniques in Dealing with Copper Metalization in ICs

Author keywords

[No Author keywords available]

Indexed keywords

FOCUSED ION BEAMS (FIB); SEMICONDUCTOR CHIPS;

EID: 1542330652     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (3)

References (5)
  • 1
    • 1542360796 scopus 로고    scopus 로고
    • The Challenges of Focused-Ion-Beam Chip Repair and Debug Assistance in the 0.25um Copper Interconnect Millennium
    • 16-20 November
    • Herschbein, S. B., L. S. Fischer, A. D. Shore, M. P. Tenney, T. L. Kane, " The Challenges of Focused-Ion-Beam Chip Repair and Debug Assistance in the 0.25um Copper Interconnect Millennium" ISTFA, 16-20 November 1998.
    • (1998) ISTFA
    • Herschbein, S.B.1    Fischer, L.S.2    Shore, A.D.3    Tenney, M.P.4    Kane, T.L.5
  • 2
    • 0030274017 scopus 로고    scopus 로고
    • The Application of Advanced Techniques for Complex Focused Ion Beam Device Modification
    • Abramo, M. T., L. L. Hahn, "The Application of Advanced Techniques for Complex Focused Ion Beam Device Modification", Microelectron. Reliab. 36 (11/12), 1775 (1996)
    • (1996) Microelectron. Reliab. , vol.36 , Issue.11-12 , pp. 1775
    • Abramo, M.T.1    Hahn, L.L.2
  • 3
    • 39149131807 scopus 로고
    • S2Br2, S2Cl2, S2F2: A New Line of Halogen-Containing Gases for Low Pressure Plasma Etch Processes
    • Sept
    • J. Pelletier, Y. Arnal, M. Pons and A. Inard, "S2Br2, S2Cl2, S2F2: A New Line of Halogen-Containing Gases for Low Pressure Plasma Etch Processes", Japanese Journal of Applied Physics, Vol 29, No 9, Sept 1990
    • (1990) Japanese Journal of Applied Physics , vol.29 , Issue.9
    • Pelletier, J.1    Arnal, Y.2    Pons, M.3    Inard, A.4
  • 4
    • 0010964434 scopus 로고
    • Halogen-Based Selective FIB Milling for IC Probe-Point Creation and Repair
    • 13-18 November
    • Ximen, H., C. G. Talbot, "Halogen-Based Selective FIB Milling for IC Probe-Point Creation and Repair", ISTFA, 13-18 November, 1994, pp. 141-149.
    • (1994) ISTFA , pp. 141-149
    • Ximen, H.1    Talbot, C.G.2
  • 5
    • 1542300934 scopus 로고    scopus 로고
    • Integrated Circuit Device Repair using FIB system: Tips, Tricks, and Strategies
    • 14-18 November
    • Hooghan, K.N. K.S. Wills, P.A. Rodriguez, S. O'Connell, "Integrated Circuit Device Repair using FIB system: Tips, Tricks, and Strategies", ISTFA, 14-18 November, 1999, pp. 247-254.
    • (1999) ISTFA , pp. 247-254
    • Hooghan, K.N.1    Wills, K.S.2    Rodriguez, P.A.3    O'Connell, S.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.