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Volumn , Issue , 2001, Pages 285-288
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Various Focused Ion Beam Microsurgery Techniques in Dealing with Copper Metalization in ICs
a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
FOCUSED ION BEAMS (FIB);
SEMICONDUCTOR CHIPS;
COPPER;
CORROSION;
CRYSTALLOGRAPHY;
DIFFUSION;
ELECTRONS;
ETCHING;
FAILURE ANALYSIS;
ION BEAMS;
METALLIZING;
MILLING (MACHINING);
SPUTTERING;
INTEGRATED CIRCUITS;
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EID: 1542330652
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (3)
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References (5)
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