Characteristic of thin-film NTC thermal sensors

Proceedings of IEEE Sensors

Volumn 1, Issue 1, 2002, Pages 56-61

  Lee, Moonho ^a   Yoo, Mina ^a  

^a Yeungnam University   (South Korea)

Author keywords

Infrared; Micromachining technology; NTC; Thermal sensor; Thin membrane; Thin film

Indexed keywords

ANNEALING; INFRARED RADIATION; MANGANESE COMPOUNDS; MICROMACHINING; MICROSTRUCTURE; THERMISTORS; THERMOCOUPLES; THIN FILMS;

MICROMACHINING TECHNOLOGY; NEGATIVE TEMPERATURE COEFFICIENT (NTC); NTC; THERMAL SENSORS; THIN MEMBRANES;

SENSORS;

EID: 1542301810     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

1. W. Whatraore, "Pyroelectric devices and materials," Rep. Prog. Phys., 49, 1986.
2. M. Lee and S. Bae, "Temperature-induced transient noise of pyroelectric thermal detector," Opt. Eng., 39(11), 2000.
3. E. H. Putley, "The Applications of pyroelectric devices" Ferroelectrics 33, 1981.
4. P. Kleinschmidt and W. Hanrieder, "The Future of sensors, materials science or software engineering" Sensors and Actuators A 33, 1992.
5. P. T. Lai and B. Li., "Spreading-resistance temperature sensor on silicon-on-insulator," IEEE Elec. Dev. Lett., 20, 1999.
6. T. Yokoyama, "Preparation and electrical properties of monophase cubic spinel" J. Mat. Sci., 30, 1995.
7. S. Baliga and A. L. Jain, "Sputter deposition and characterization of Ni-Mn-O and Ni-Co-Mn-O spinel on polymide and glass substrates," Appl. Phys., 50, 1990.
8. H. Jerominek, F. Picard and N. Swart, "Micromachined, uncooled, VO-based, IR bolometer arrays" SPIE, 2746, 1996.
9. A. Dziedzic, L. Golonka and H. Kozlowski, "Thick-film resistive temperature sensors" Meas. Sci. Technol., 8, 1996.
10. S. Baliga, M. Rost, A. Doctor, "Sputtered film thermistor IR detectors," SPIE 2225., 1994.