Identification of anisoelasticity for electrostatic "trimming" of rate integrating gyroscopes

Proceedings of SPIE-The International Society for Optical Engineering

Volumn 4700, Issue , 2002, Pages 157-168

  Painter, Chris C ^a   Shkel, Andrei M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Anisoelasticity; Electrostatic Trimming; Feedforward Control; Rate Integrating Gyroscopes; Smart MEMS

Indexed keywords

ALGORITHMS; DYNAMIC RESPONSE; ELASTICITY; ELECTRODES; INTELLIGENT STRUCTURES; MICROELECTROMECHANICAL DEVICES; VOLTAGE CONTROL;

ANISOELASTICITY;

GYROSCOPES;

EID: 0036030978     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.475027     Document Type: Article

References (11)

1. W.A. Clark, Micromachined Vibratory Rate Gyroscopes. PhD thesis, UC Berkeley, 1997.
2. M. Putty, and K. Najafi, "A micromachined vibrating ring gyroscope," in IEEE Solid State Sensors and Actuators Workshop, pp. 213-220, Hilton Head Island, SC, June 1996.
3. A. Shkel and R.T. Howe, "Polysilicon Surface Micromachined Rate Integrating Gyroscopes." UC-Berkeley Office of Technology and Licensing. Case Number B99-077.
4. A. Shkel, "Smart MEMS: micro-structures with error-suppression and self-calibration control capabilities," in The American Control Conference, Arlington, CA, June 2001.
5. C. Painter and A. Shkel, "Structural and thermal modeling of a MEMS angular gyroscope," in 2001 SPIE Annual International Symposium on Smart Structures and Materials, Newport Beach, CA, March 2001.
6. A. Shkel, R. Horowitz, A. Seshia, and R.T. Howe, "Dynamics and control of micromachined gyroscopes," in The American Control Conference, pp. 2119-2124, San Diego, CA, June 1999.
7. A. Shkel, R.T. Howe, and R. Horowitz, "Modeling and simulation of micromachined gyroscopes in the presence of imperfections," in 1999 International Conference on Modeling and Simulation of Microsystems, pp. 605-608, San Juan, Puerto Rico, April 1999.
8. A. Basilevsky, Statistical Factor Analysis for Related Methods, Theory and Applications, John Wiley & Sons, Inc., 1994.
9. Young-Ho Cho, Byung Man Kwak, Albert P. Pisano, and Roger T. Howe, "Viscous energy dissipation in laterally oscillating planar microstructures: a theoretical and experimental study," in IEEE Proceedings of Micro Electro Mechanical Systems Workshop, Fort Lauderdale, FL, February 1993.
10. V.F. Zhuravlev, "Oscillation shape control in resonant systems," J. Appl. Maths Mechs. 56(5), pp. 725-735, 1992.
11. T. Remtema and L. Lin, "Active Frequency Tuning for Microresonators by Localized Thermal Stressing Effects," in Solid-State Sensor and Actuator Workshop, pp. 363-366, Hilton Head Island, SC, June 2000.