Structural and thermal analysis of a MEMS angular gyroscope

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4334, Issue , 2001, Pages 86-94

  Painter, C C ^a   Shkel, A M ^a  

^a University of California at Irvine   (United States)

Author keywords

Angular Gyroscope; Isotropic Suspension; MEMS Gyroscope; Structural Modeling of MEMS; Thermal Modeling of MEMS

Indexed keywords

FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; RESIDUAL STRESSES; SPRINGS (COMPONENTS); STRAIN; SUSPENSIONS (COMPONENTS);

SPRING SUSPENSION SYSTEMS;

GYROSCOPES;

EID: 0035152887     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.436630     Document Type: Conference Paper

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