Design and simulation of integrated CMOS-compatible capacitive absolute pressure-sensing Microsystems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4928, Issue , 2002, Pages 118-126

  Zhou, Min Xin ^a   Huang, Qing An ^a   Qin, Ming ^a  

^a Southeast University   (China)

Author keywords

CMOS compatible; Integrated absolute pressure sensors; Microsystem

Indexed keywords

CAPACITIVE SENSORS; CMOS INTEGRATED CIRCUITS; COMPUTER AIDED SOFTWARE ENGINEERING; INTEGRATED CIRCUIT DESIGN; PRESSURE SENSORS; SIGNAL PROCESSING; TRANSDUCERS;

ABSOLUTE PRESSURE; CAPACITIVE STRUCTURE; CMOS COMPATIBLE; DESIGN AND SIMULATION; MICROELECTROMECHANICS; MICROMACHINED STRUCTURES; MICROSYSTEMS DESIGNS; SIGNAL PROCESS CIRCUITS;

MICROSYSTEMS;

EID: 1542289449     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.483160     Document Type: Conference Paper

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