A Microfabrication Strategy for Cylindrical Ion Trap Mass Spectrometer Arrays

Proceedings of IEEE Sensors

Volumn 1, Issue 1, 2002, Pages 651-655

  Peddanenikalva, Himani ^a   Potluri, Kiran ^a   Bhansali, Shekhar ^a,b   Timothy Short, R ^b   Fries, David ^b  

^a University of South Florida   (United States)

^b UNIVERSITY OF SOUTH FLORIDA   (United States)

Author keywords

Cylindrical Ion Traps; CYTOP; Miniature Mass Spectrometer; Porous Si Etching

Indexed keywords

BOND STRENGTH (CHEMICAL); DOPING (ADDITIVES); DRILLING; ELECTRIC INSULATORS; HOLE TRAPS; MICROELECTROMECHANICAL DEVICES; POROUS SILICON; REACTIVE ION ETCHING; ULTRASONIC APPLICATIONS;

CYLINDRICAL ION TRAPS (CIT); CYTOP; MINIATURE MASS SPECTROMETERS; POROUS SI ETCHING;

MASS SPECTROMETERS;

EID: 1542271546     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. Ethan R. Badmati, Rudolph C. Johnson, Wolfgand R. Plass, and R. Graham Cooks, "A Miniature Cylindrical Quadrupole Ion Trap: Simulation and Experiment," Analytical Chemistry, Vol. 70, No. 23, pp. 4896-4901, 1998.
2. Oleg Kornienko, Peter T. A. Reilly, William B. Whitten, and J. Michael Ramsey, " Electron Impact Ionization in a Microion Trap Mass Spectrometer," Rev. of Scientific Instruments, Vol. 70, No. 10, pp. 3907-3909, 1999.
3. J. Mitchell Wells, Ethan R. Badman, and R. Graham Cooks, " A Quadrupole Ion Trap With Cylindrical Geometry Operated in the Mass-Selective Instability Mode," Analytical Chemistry, Vol. 70, No. 3, pp. 438-444, 1998.
4. th International Conference on Solid-State Sensors and Actuators, 2001.
5. Ethan R. Badman, and R. Graham Cooks, " A Parallel Miniature Cylindrical Ion Trap Array," Analytical Chemistry, Vol 72, No. 14, pp. 3291-3297, 2000.
6. Kwang W. Oh, Arum Han, Shekhar Bhansali, and Chong H. Ahn, " A Low Temperature Bonding technique using spin-on fluorocarbon polymers to assemble microsystems," Journal of Micromechanics and Microengineering, Vol 12, pp 187-191, 2002.