Analogic fiber optic position sensor with nanometric resolution

Proceedings of IEEE Sensors

Volumn 1, Issue 2, 2002, Pages 926-930

  Lamarque, Frédéric ^a   Prelle, Christine ^a  

^a UNIVERSITÉ DE TECHNOLOGIE DE COMPIÈGNE   (France)

Author keywords

Fiber optic sensor; Miniature sensor; Nanometric resolution

Indexed keywords

COMPUTER SIMULATION; DIAMONDS; DIFFRACTION GRATINGS; INTERFEROMETERS; INTERPOLATION; LASERS; LIGHT EMISSION; LIGHT REFLECTION; MACHINING; NANOTECHNOLOGY; OPTICAL FIBERS; OPTICAL RESOLVING POWER;

MINIATURE SENSORS; NANOMETRIC RESOLUTION;

FIBER OPTIC SENSORS;

EID: 1542271474     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. Th. Velten, D. Stephan and E. Obermeir, "Micro coil with movable core for application in an inductive displacement sensor", Journal of micromechanics and microengineering, Vol. 9, pp 119-122, 1999.
2. Y. Jourlin, O. Parriaux, J. Jay, J. L. Noullet, P. Arguel, S. Fourment, F. Lozes-Dupuy, G. Sarrabayrouse, "Codeur optique miniature haute résolution", 1er colloque Francophone "Méthodes et Techniques Optiques pour l'industrie", Biarritz (France), November 21-24, 2000, pp. 208-313.
3. Y. Jourlain, F. Pigeon, O. Parriaux, M. Bonis, S. Topçu, Y. Alayli, "Double read head for the measurement of differential effects on a grating scale", Proc, of second Euspen international conference, Turin (Italie), 27-31 mai 2001, pp. 534-537.
4. H. Miyajima, E. Yamamoto, K. Yanagisawa, "Optical micro encoder with sub-micro resolution using a VCSEL", Sensors and Actuators A, Vol. 71, pp 213-218, 1998.
5. D. Wang, "Conception et réalisation d'un minicapteur de déplacement à fibres optiques de résolution nanométrique", Thèse de doctorat, Université de Technologie de Compiègne, 120p, 1999.
6. N. Ikawa, S. Shimada and H. Morooka, " Photoelectronic displacement sensor with nanometre resolution", Precision Engineering, Vol.9, no2, 1987, pp. 79-82.
7. Y. Alayli, D. Wang and M. Bonis, "Optical fiber profilometer with submicronic accuracy, SPIE, 3509, pp 84-87, 1998
8. C. Prelle, F. Lamarque et P.E. Mazeran. "Miniature high resolution sensor for long stroke measurements", Mecatronics'01, 5th Franco-Japanese Congress & 3rd European-Asian Congress, Besançon (France), October 9-11, 2001, pp 443-446.