Tilt and interfacial fluid pressure measurements of a disk sliding on a polymeric pad

Journal of Tribology

Volumn 127, Issue 1, 2005, Pages 198-205

  Ng, Sum Huan ^a   Borucki, Len ^b   Higgs III, C Fred ^c   Yoon, Inho ^a   Osorno, Andrés ^a   Danyluk, Steven ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b Intelligent Planar   (United States)

^c CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL MECHANICAL POLISHING; DISKS (MACHINE COMPONENTS); FLUID MECHANICS; LUBRICATION; MAPPING; MATHEMATICAL MODELS; PRESSURE EFFECTS;

CAPACITIVE SENSING; FLUID PRESSURES; POLYMERIC PADS; TWO-DIMENSIONAL PRESSURE MAPPING;

TRIBOLOGY;

INTERFACIAL TENSION;

EID: 15044360276     PISSN: 07424787     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1829718     Document Type: Article

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