Pad soaking effect on interfacial fluid pressure measurements during CMP

Journal of Tribology

Volumn 125, Issue 3, 2003, Pages 582-586

  Ng, Sum Huan ^a   Hight, Robert ^a   Zhou, Chunhong ^a   Yoon, Inho ^a   Danyluk, Steven ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; FLUID DYNAMICS; POLYURETHANES; SOAKING PITS; SURFACE CHEMISTRY;

FLUID PRESSURE;

CHEMICAL MECHANICAL POLISHING;

INTERFACIAL TENSION; MACHINING; MEASUREMENT METHOD; POLISHING; PRESSURE;

EID: 0041520530     PISSN: 07424787     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1538632     Document Type: Article

References (13)

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