Fabrication of two-dimensional hybrid photonic crystals utilizing electron beam lithography

Microelectronic Engineering

Volumn 78-79, Issue 1-4, 2005, Pages 442-447

  Stodolka, J ^a   Nau, D ^b   Frommberger, M ^a   Zanke, C ^a   Giessen, H ^b   Quandt, E ^a  

^a CENTER OF ADVANCED EUROPEAN STUDIES AND RESEARCH CAESAR   (Germany)

^b INSTITUT FÜR ANGEWANDTE PHYSIK   (Germany)

Author keywords

Electron beam lithography; Nanodots; Photonic crystals

Indexed keywords

CRYSTALS; ELECTRON BEAM LITHOGRAPHY; FABRICATION; METALLIZING; PROBLEM SOLVING; SEMICONDUCTOR MATERIALS;

HYBRID PHOTONIC CRYSTALS; LOW-LOSS WAVE PROPAGATION; NANODOTS; PHOTONIC CRYSTALS;

PHOTONS;

EID: 14944384783     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2004.12.056     Document Type: Conference Paper

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