Ion beam lithographic fabrication of ordered VO2 nanoparticle arrays

Materials Research Society Symposium Proceedings

Volumn 820, Issue , 2004, Pages 319-324

  Lopez, R ^a   Suh, J Y ^a   Feldman, L C ^a   Haglund Jr , R F ^a  

^a VANDERBILT UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ARRAYS; ELECTRONIC STRUCTURE; FABRICATION; NANOSTRUCTURED MATERIALS; PHASE TRANSITIONS; POLYMETHYL METHACRYLATES; PULSED LASER DEPOSITION; SURFACE PLASMON RESONANCE; VANADIUM COMPOUNDS;

NANOPARTICLE ARRAYS; PHOTONIC CRYSTALS; THERMAL ANNEALING;

ION BEAM LITHOGRAPHY;

EID: 14944381540     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-820-r1.5     Document Type: Conference Paper

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