Mechanism of copper chemical vapor deposition from copper dipivaloylmethanate in hydrogen

Inorganic Materials

Volumn 41, Issue 1, 2005, Pages 19-23

  Bakovets, V V ^a   Levashova, T M ^a   Dolgovesova, I P ^a   Maksimovskii, E A ^a  

^a NIKOLAEV INSTITUTE OF INORGANIC CHEMISTRY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CHELATE; COPPER DERIVATIVE; DIKETONE; HYDROGEN;

ADSORPTION KINETICS; ARTICLE; CATALYSIS; CHEMICAL REACTION KINETICS; DISSOCIATION; MOLECULAR MECHANICS; REDUCTION KINETICS; TEMPERATURE DEPENDENCE; VAPOR;

EID: 14944366506     PISSN: 00201685     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10789-005-0005-4     Document Type: Article

References (16)

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