Preparation of thin copper films from the vapour phase of volatile copper(I) and copper(II) derivatives by the CVD method

Uspekhi Khimii

Volumn 69, Issue 12, 2000, Pages 1149-1177

  Vertoprakhov, V N ^a   Krupoder, S A ^a  

^a ENERGY SYSTEMS INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 11144221361     PISSN: 00421308     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (3)

1. T.M.Makhviladze, M.E.Sarychev, Y.V.Zhitnikov. Tpy, 13, 98 (1997)
2. S.Vaidya, D.B.Fraser, W.S.Lindenberger. J. Appl. Phys., 51, 4475 (1980)
3. A.A.Milgram. J. Vac. Sci. Technol. B, 1, 490 (1983)