Integrated and microheater embedded gas sensor array based on the polymer composites dispensed in micromachined wells

Sensors and Actuators, B: Chemical

Volumn 105, Issue 2, 2005, Pages 549-555

  Ha, Seung Chul ^a   Kim, Yong Shin ^a   Yang, Yoonseok ^a   Kim, Young Jun ^a   Cho, Seong Mok ^a   Yang, Haesik ^a   Kim, Youn Tae ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

Microheater; Micromachined well; Polymer carbon black composite; Sensor array

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPOSITE MATERIALS; ELECTRIC RESISTANCE; MICROMACHINING; PLASTICIZERS; SOLVENTS; SPECIFIC HEAT;

HEAT SENSOR FILM; MICROHEATER; MICROMACHINED WELL; POLYMER-CARBON BLACK COMPOSITES; SENSOR ARRAY;

CHEMICAL SENSORS;

EID: 14744305706     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2004.01.019     Document Type: Article

References (13)

1. Taurino A.M., Monaco D.D., Capone S., Epifani M., Rella R., Siciliano P., Ferrara L., Maglione G., Basso A., Balzarano D. Analysis of dry salami by means of an electronic nose and correlation with microbiological methods. Sens. Actuators B: Chem. 95:2003;123-131
2. Branca A., Simonian P., Ferrante M., Novas E., Negri R.M. Electronic nose based discrimination of a perfumery compound in a fragrance. Sens. Actuators B: Chem. 92:2003;222-227
3. Guadarrama A., Rodríguez-Méndez M.L., de Saja J.A. Conducting polymer-based array for the discrimination of odours from trim plastic materials used in automobiles. Anal. Chim. Acta. 455:2002;41-47
4. Natale C.D., Macagnano A., Martinelli E., Paolesse R., D'Arcangelo G., Roscioni C., Finazzi-Agrò A., D'Amico A. Lung cancer identification by the analysis of breath by means of an array of non-selective gas sensors. Biosens. Bioelectron. 18:2003;1209-1218
5. Mo Y., Okawa Y., Inoue K., Natukawa K. Low-voltage and low-power optimization of micro-heater and its on-chip drive circuitry for gas sensor array. Sens. Actuators A: Phys. 100:2002;94-101
6. Wollenstein J., Plaza J.A., Cane C., Min Y., Bottner H., Tuller H.L. A novel single chip thin film metal oxide array. Sens. Actuators B: Chem. 93:2003;350-355
7. Sheng L.-Y., Tang Z., Wu J., Chan P.C.H., Sin J.K.O. A low-power CMOS compatible integrated gas sensor using maskless tin oxide sputtering. Sens. Actuators B: Chem. 49:1998;81-87
8. Lonergan M.C., Severin E.J., Doleman B.J., Beaber S.A., Grubbs R.H., Lewis N.S. Array-based vapor sensing using chemically sensitive carbon black-polymer resistors. Chem. Mater. 8:1996;2298-2312
9. Doleman B.J., Lonergan M.C., Severin E.J., Vaid T.P., Lewis N.S. Quantitative study of the resolving power of arrays of carbon black-polymer composites in various vapor-sensing tasks. Anal. Chem. 70:1998;4177-4190
10. Briglin S.M., Freund M.S., Tokumaru P., Lewis N.S. Exploitation of spatiotemporal information and geometric optimization of signal/noise performance using arrays of carbon black-polymer composite vapor detectors. Sens. Actuators B: Chem. 82:2002;54-74
11. Koscho M.E., Grubbs R.H., Lewis N.S. Properties of vapor detector arrays formed through plasticization of carbon black-organic polymer composites. Anal. Chem. 74:2002;1307-1315
12. Zee F., Judy J.W. Micromachined polymer-based chemical gas sensor array. Sens. Actuators B: Chem. 72:2001;120-128
13. Haug M., Schierbaum K.D., Gauglitz G., Göpel W. Chemical sensors based upon polysiloxanes: comparison between optical, quartz microbalance, calorimetric, and capacitance sensors. Sens. Actuators B: Chem. 11:1993;383-391