A novel AC current source for capacitance-based displacement measurements

IEEE Transactions on Instrumentation and Measurement

Volumn 46, Issue 2, 1997, Pages 640-643

  Nerino, Roberto ^a   Sosso, Andrea ^a   Picotto, Gian Bartolo ^b  

^a ISTITUTO ELETTROTECNICO NAZIONALE GALILEO FERRARIS   (Italy)

^b Istituto di Metrologia Gustavo Colonnetti   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; BUFFER CIRCUITS; ELECTRIC IMPEDANCE; POWER SUPPLY CIRCUITS; SENSORS;

CAPACITIVE SENSORS; INPUT SHIELDING CONNECTIONS;

CAPACITANCE MEASUREMENT;

EID: 0031122853     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/19.572051     Document Type: Article

References (10)

1. B. Hague (revised by Foord), Alternating Current Bridge Methods, 6th ed. London, U.K.: Pitman, 1971.
2. W. Heerens, "Application of capacitance techniques in sensor design," J. Phys. E: Sci. Instrum., vol. 19, pp. 897-906, 1986.
3. S. M. Huangh, A. L. Stott, R. G. Green, and M. S. Beck, "Electronic transducer for industrial measurement of low value capacitances," J. Phys. E: Sci. Instrum., vol. 21, pp. 242-250, 1988.
4. G. B. Picotto, S. Desogus, S. Lányi, R. Nerino, and A. Sosso, "Scanning tunneling microscopy head having integrated capacitive sensors for calibration of scanner displacements," J. Vac. Sci. Technol., vol. B.14, no. 2, p. 897, 1996.
5. X. Zhao, G. Wilkening, H. Marth, and K. Horn, "High-accuracy capacitance sensor for positioning of piezoelectric displacement actuator," in Dig. ACTUATOR 94 Conf., Bremen, Germany, June 15-17, 1994.
6. W. C. Kabele, "A fast microcomputer-controlled admittance bridge," IEEE Trans. Instrum. Meas., vol. IM-25, pp. 541-544, Dec. 1976.
7. F. N. Toth and G. Meyer, "A low-cost, smart capacitive position sensor," IEEE Trans. Instrum. Meas., vol. 41, pp. 1041-1044, Dec. 1992.
8. P. D. Chapman, "A capacitance-based ultra-precision spindle error analyzer," Precision Eng., vol. 7, no. 3, July 1985.
9. W. Heerens, "Multi-terminal capacitor sensors," J. Phys. E: Sci. Instrum., vol. 15, pp. 137-141, 1982.
10. J. Steel and T. Green, "Tame those versatile current source circuits," Elec. Des., pp. 61-72, Oct. 15, 1992.