Secondary neutral and ionized particle measurements under MeV-energy ion bombardment

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 230, Issue 1-4, 2005, Pages 489-494

  Nakata, Yoshihiko ^a   Ninomiya, Satoshi ^a   Imada, Chikage ^a   Nagai, Masafumi ^a   Aoki, Takaaki ^a   Matsuo, Jiro ^a   Imanishi, Nobutsugu ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

Axial emission energy; Electronic sputtering; Secondary ion; Secondary neutral

Indexed keywords

ION BEAMS; LASER PULSES; LIGHT REFLECTION; PHOTOIONIZATION; SECONDARY EMISSION; SILICON; ULTRAVIOLET RADIATION;

AXIAL EMISSION ENERGY; ELECTRONIC SPUTTERING; SECONDARY ION; SECONDARY NEUTRAL PARTICLES;

ION BOMBARDMENT;

EID: 14744293960     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.12.089     Document Type: Conference Paper

References (18)

1. J.A.M. Pereira, and E.F. da Silveira Nucl. Instr. and Meth. B 146 1998 185
2. A. Brunelle, S. Della-Negra, J. Depauw, D. Jacquet, Y. Le Beyec, and M. Pautrat Phys. Rev. A 63 2001 022902
3. M. Salehpour, D.L. Fishel, and J.E. Hunt Phys. Rev. B 38 1988 12320
4. T. Sekioka, M. Terasawa, T. Mitamura, M.P. Stockli, U. Lehnert, and C. Fehrenbach Nucl. Instr. and Meth. B 182 2001 121
5. T. Schenkel, A.V. Barnes, A.V. Hamza, and D.H. Schneider Eur. Phys. J. D 1 1998 297
6. N. Imanishi, S. Kyoh, A. Shimizu, M. Imai, and A. Itoh Nucl. Instr. and Meth. B 135 1998 424
7. W. Husinsky, G. Betz, and I. Girgis J. Vac. Sci. Technol. A 2 1984 698
8. S.R. Coon, W.F. Calaway, J.W. Burnett, M.J. Pellin, D.M. Gruen, D.R. Spiegel, and J.M. White Surf. Sci. 259 1991 275
9. E. Vandeweert, V. Philipsen, W. Bouwen, P. Thoen, H. Weidele, R.E. Silverans, and P. Lievens Phys. Rev. Lett. 78 1997 138
10. W. Berthold, and A. Wucher Phys. Rev. B 56 1997 4251
11. S. Ninomiya, and N. Imanishi Vacuum 73 2004 79
12. S. Ninomiya, N. Imanishi, J. Xue, S. Gomi, and M. Imai Nucl. Instr. and Meth. B 193 2002 745
13. C.E. Moore, Atomic Energy Levels, Vol. III, Nat. Bur. Stand. (US), 35, US GPO, Washington, DC, 1971
14. S. Kaesdorf, M. Hartmann, H. Schroder, and K.L. Kompa Int. J. Mass Spec. Ion Proc. 116 1992 219
15. M.F. Zimmermann, and W. Ho Surf. Sci. Rep. 22 1995 127
16. S.R. Coon, W.F. Calaway, M.J. Pellin, G.A. Curlee, and J.M. White Nucl. Instr. and Meth. B 82 1993 329
17. W. Husinsky, G. Nicolussi, and G. Betz Nucl. Instr. and Meth. B 82 1993 323
18. M.J. Bevan, and D. Husain J. Photochem. 4 1975 51