The influence of thermal treatment on the stress characteristics of suspended porous silicon membranes on silicon

Sensors and Actuators, B: Chemical

Volumn 103, Issue 1-2, 2004, Pages 356-361

  Papadimitriou, D ^a   Tsamis, C ^b   Nassiopoulou, A G ^b  

^a NATIONAL TECHNICAL UNIVERSITY OF ATHENS   (Greece)

^b INSTITUTE OF NANOSCIENCE AND NANOTECHNOLOGY   (Greece)

Author keywords

Micro hotplates; Porous silicon; Stress; Suspended membranes

Indexed keywords

ANNEALING; ANODIC OXIDATION; CHEMICAL VAPOR DEPOSITION; ETCHING; HEAT TREATMENT; ION IMPLANTATION; MEMBRANES; OHMIC CONTACTS; RAMAN SPECTROSCOPY; STRESS ANALYSIS;

DEVICE FABRICATION; ISOTROPIC ETCHING; MICRO-HOTPLATES; SUSPENDED MEMBRANES;

POROUS SILICON;

EID: 14744290062     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2004.04.065     Document Type: Conference Paper

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