Wet-etching characteristics of Ge2Sb2Te5 thin films for phase-change memory

IEEE Transactions on Magnetics

Volumn 41, Issue 2, 2005, Pages 1031-1033

  Cheng, Huai Yu ^a   Jong, Chao An ^b   Lee, Chain Ming ^b   Chin, Tsung Shune ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Etching solution; Ovonic unified memory (OUM); Phase change memory; Phase change ram (PRAM); Random access memories (RAMS); Wet etching

Indexed keywords

AMORPHOUS FILMS; ANNEALING; ATOMIC FORCE MICROSCOPY; CRYSTALLIZATION; ETCHING; GERMANIUM COMPOUNDS; MORPHOLOGY; NITRIC ACID; RANDOM ACCESS STORAGE;

ETCHING SOLUTIONS; OVONIC UNIFIED MEMORY (OUM); PHASE CHANGE RAM (PRAM); PHASE-CHANGE MEMORY; WET ETCHING;

THIN FILMS;

EID: 14544307824     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2004.842136     Document Type: Article

References (9)

1. G. A. Prinz, "Magnetoelectronics," Science, vol. 282, pp. 1660-1663, 1998.
2. S. Lai and T. Lowrey, "OUM - a 180 nm nonvolatile memory cell element technology for stand alone and embedded applications," in IEDM Tech. Dig., 2001, pp. 803-806.
3. 5 chalcogenide," in LSI Symp. Tech. Dig., Oct. 2003, pp. 32-35.
4. K. Nakayama, K. Kojima, Y. Imai, T. Kasai, S. Fukushima, A. Kitagawa, M. Kumeda, Y. Kakimoto, and M. Suzuki, "Nonvolatile memory based on phase-change in Se-Sb-Te glass," Jpn. J. Appl. Phys., vol. 42, pp. 404-408, 2003.
5. I. M. Dharmadasa, C. J. Blomfield, G. E. Gregory, and J. Young, "Influence of chemical etching on metal contacts to II-VI compounds: CdTe and ZnSe," Int. J. Electron., vol. 76, pp. 961-967, 1994.
6. Y. Okuno, H. Tamura, and T. Maruyama, "Etching solution and method and apparatus for zinc chalcogenides," U.S. Patent 5 445 706, 1995.
7. R. F. Berbrick and W. W. Scanlon, "Chemical etches and etch pit pattern on PbS crystals," J. Chem. Phys., vol. 27, no. 3, pp. 607-608, 1957.
8. x," J. Electrochem. Soc., vol. 114, no. 6, pp. 632-633, 1967.
9. V. V. Robozerov, V. A. Zykov, and T. A. Gavrilova, "Chemical etching of lead chalcogenides," Inorganic Mater., vol. 36, no. 2, pp. 127-131, 2000.