Use of waveguide light scattering for precision measurements of the statistical parameters of irregularities of integrated optical waveguide materials

Optical Engineering

Volumn 44, Issue 1, 2005, Pages 1-10

  Yegorov, Alexandre A ^a  

^a PEOPLES FRIENDSHIP UNIVERSITY OF RUSSIA   (Russian Federation)

Author keywords

Autocovariance function; Integrated optics; Laser measurements; Noise; Waveguide scattering problems

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; FUNCTIONS; INTEGRATED OPTICS; INVERSE PROBLEMS; LIGHT SCATTERING; PRECISION ENGINEERING; PROFILOMETRY; SCANNING ELECTRON MICROSCOPY; SIGNAL TO NOISE RATIO; STATISTICAL METHODS;

AUTOCOVARIANCE FUNCTION; INTEGRATED OPTICAL WAVEGUIDE MATERIALS; LASER MEASUREMENTS; PRECISION MEASUREMENTS; STANDARD MECHANICAL PROFILOMETER; WAVEGUIDE LIGHT SCATTERING;

OPTICAL WAVEGUIDES;

EID: 14544281957     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1828469     Document Type: Article

References (20)

1. V. V. Shevchenko, Continuous Transitions in Open Waveguides, Golem Press, Boulder, CO (1971).
2. D. Marcuse, Light Transmission Optics, Van Nostrand Reinhold Company, New York (1972).
3. D. J. Walter and J. Houghton, "Attenuation in thin film optical waveguides due to roughness-induced mode coupling," Thin Solid Films 52, 461-476 (1978).
4. E. Bradley and D. G. Hall, "Out-of-plane scattering from glass waveguides: comparison of theory and experiment," Opt. Lett. 7 5), 235-237 (1982).
5. M. Gottlieb, G. B. Brandt, and J. J. Conroy, "Out-of-plane scattering in optical waveguides," IEEE Trans. Circuits Syst. CAS-26 12), 1029-1035 (1979).
6. D. G. Hall, "Scattering of optical waves by waveguide surface roughness: a three-dimensional treatment," Opt. Lett. 6 12), 601-603 (1981).
7. M. Imai, M. Koseki, and Y. Ohtsuka, "Scattering pattern measurement and analysis of sputtered-glass optical waveguides for integrated optics," IEEE Trans. Microwave Theory Tech. MTT-30(4), 635-641 (1982).
8. A. A. Egorov, "Theory of waveguide optical microscopy," Laser Phys. 8(2), 536-540 (1998).
9. A. A. Egorov, "Determination of parameters of a statistical ensemble of microobjects in a waveguide optical microscope," Bull. Russ. Acad. Sci. Phys. 63(6), 894-899 (1999).
10. A. A. Yegorov, "Recovery of the characteristics and determination of the parameters of statistical nanometer surface roughness using the data on scattering in a planar optical waveguide," Radiophys. Quantum Electron. 43(12), 980-988 (2000).
11. A. A. Egorov, "Inverse light scattering problem in a planar waveguide with statistical subwavelength irregularities (theory and computer simulation)," in Book of Abstracts of 2nd Int. Conf. Modern Trends in Computational Physics, p. 163, Dubna, Russia (2000).
12. A. A. Egorov, "Using waveguide light scattering for determining the autocorrelation function of statistical surface roughness within a wide range of changes of the roughness correlation interval," Quantum Electron. 32(4), 357-361 (2002).
13. A. A. Yegorov, "A new algorithm of restoring the autocorrelation function of subwavelength statistic surface roughness by light scattering in integrated optical waveguide in the presence of a high additive stochastic noise," Proc. SPIE 4900 (Part 2), 792-801 (2002).
14. A. A. Egorov, "Waveguide light scattering: correct restoration of the statistic characteristic of the thin films and optical surface irregularities," Proc. SPIE 4829, 591-592 (2002).
15. A. N. Tikhonov and V. Y. Arsinin, Solution of Ill-Posed Problem, Winston/Willey, Washington, DC (1977).
16. S. A. Akhmanov, Y. E. Diakov, and A. S. Chirkin, Introduction to Statistic Radiophysics and Optics, Nauka, Moscow (1981) (in Russian).
17. A. A. Yegorov, "Retrieval of the characteristics and determination of parameters of a statistical nanometer-scale surface roughness by the light scattering data on scattering in a planar optical waveguide in the presence of additive noise," Radiophys. Quantum Electron. 45 7), 577-584 (2002) (in Russian).
18. A. A. Yegorov, "Restoration of the autocorrelation function of a statistic surface roughness on the light scattering in a planar optical waveguide in the presence of the additive stochastic noise," Proc. SPIE 4750, 192-201 (2002).
19. A. A. Yegorov, "Using of the waveguide light scattering for precision measurements of the statistic parameters of irregularities of integrated optical waveguide's materials," Proc. SPIE 4987, 299-309 (2003).
20. A. A. Egorov, "Inverse laser irradiation scattering problem in a planar waveguide with statistical irregularities. Computer modelling for a case of large additive white noise," Laser Phys. 13(9), 1143-1148 (2003).