Experimental implementation of a model-based inverse filter to attenuate hysteresis in an atomic force microscope

Proceedings of the IEEE Conference on Decision and Control

Volumn 3, Issue , 2004, Pages 3062-3067

  Hatch, Andrew G ^a   Smith, Ralph C ^a   De, Tathagata ^b  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

^b Iowa State University of Science and Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; APPROXIMATION THEORY; CLOSED LOOP CONTROL SYSTEMS; DYNAMICS; FREQUENCIES; MATHEMATICAL MODELS; MICROSCOPES; PIEZOELECTRIC MATERIALS;

ATOMIC FORCE MICROSCOPES (AFM); CONTROL FILTERS; INVERSE FILTERS; OPEN LOOP CONTROL DESIGNS;

ATOMIC FORCE MICROSCOPY;

EID: 14244256798     PISSN: 07431546     EISSN: 25762370     Source Type: Conference Proceeding    
DOI: 10.1109/cdc.2004.1428936     Document Type: Conference Paper

References (10)

1. D. Croft, G. Shed and S. Devasia, "Creep, hysteresis, and vibration compensation for piezoactuators: Atomic force microscopy application," Journal of Dynamic Systems, Measurement, and Control, 23, pp. 35-43, 2001.
2. A. Daniele, S. Salapaka, M.V. Salapaka and M. Dahleh, "Piezoelectric scanners for atomic force microscopes: Design of lateral sensors, identification and control," Proceedings of the America Control Conference, San Diego, CA, pp. 253-257, 1999.
3. P.K. Hansma, V.B. Elings, O. Marti and C.E. Bracker, "Scanning tunneling microscopy and atomic force microscopy: Application to biology and technology," Science, 242, pp. 209-242, 1988.
4. ∞, Control Design for a Magnetostrictive Transducer," Proc. 42nd IEEE Conf. Dec. and Control, Maui, HA, pp. 1801-1806, 2003.
5. S. Salapaka, A. Sebastian, J.P. Cleveland and M.V. Salapaka, "High bandwidth nano-positioner: A robust control approach," Review of Scientific Instruments, 73(9), pp. 3232-3241, 2002.
6. R.C. Smith and A. Hatch, "Parameter estimation techniques for nonlinear hysteresis models," Proceedings of the SPIE, Smart Structures and Materials, to appear.
7. R.C. Smith, A. Hatch and T. De, "Model Development for Piezoceramic Nanopositioners," Proc. 42nd IEEE Conf. Dec. and Control, Maui, HA, pp. 2638-2643, 2003.
8. R.C. Smith, A. Hatch, B. Mukherjee and S. Liu, "A homogenized energy model for hysteresis in ferroelectric materials: General density formulation," Journal of Intelligent Material Systems and Structures, to appear.
9. R.C. Smith and M. Salapaka, "Model development for the positioning mechanisms in an atomic force microscope," International Series of Numerical Mathematics, Vol 143, pp. 249-269, 2002.
10. R.C. Smith, S. Seelecke, Z. Ounaies and J. Smith, "A free energy model for hysteresis in ferroelectric materials," Journal of Intelligent Material Systems and Structures, 14(11), pp. 719-739, 2003.