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Volumn 45, Issue 12, 2004, Pages 3304-3308
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Fabrication of silicon nitride thick coatings by reactive RF plasma spraying
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Author keywords
Nitride ceramics; Nitriding process; Radio frequency plasma; Reactive spraying; Silicon nitride; Thick coating
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Indexed keywords
NITRIDE CERAMICS;
NITRIDING PROCESS;
RADIO FREQUENCY PLASMA;
REACTIVE SPRAYING;
THICK COATINGS;
CERAMIC MATERIALS;
CHEMICAL VAPOR DEPOSITION;
COATING TECHNIQUES;
FABRICATION;
HARDNESS;
PARTICLE SIZE ANALYSIS;
PHYSICAL VAPOR DEPOSITION;
PLASMA SPRAYING;
SILICON NITRIDE;
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EID: 13844272185
PISSN: 13459678
EISSN: None
Source Type: Journal
DOI: 10.2320/matertrans.45.3304 Document Type: Article |
Times cited : (22)
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References (23)
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