Study of diffractive field based angular spectrum theory in thick film photoresist

Guangxue Xuebao/Acta Optica Sinica

Volumn 24, Issue 12, 2004, Pages 1691-1696

  Tang, Xionggui ^a   Guo, Yongkang ^a   Du, Jinglei ^a   Liu, Shijie ^a   Gao, Fuhua ^a  

^a SICHUAN UNIVERSITY   (China)

Author keywords

Angular spectrum theory; Fast Fourier transform algorithm; Lithography; Optical transfer function; Physical optics; Thick film photoresist

Indexed keywords

FAST FOURIER TRANSFORMS; FREQUENCY DOMAIN ANALYSIS; NUMERICAL METHODS; OPTICAL TRANSFER FUNCTION; PHOTORESISTS; PHYSICAL OPTICS; REFRACTIVE INDEX;

ANGULAR SPECTRUM THEORY; THICK FILM PHOTORESIST;

LITHOGRAPHY;

EID: 13644282959     PISSN: 02532239     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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