Load impedance measurement of an on-chip atmospheric capacitively coupled microplasma source

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 12, 2004, Pages 8308-8309

  Yoshiki, Hiroyuki ^a   Horiike, Yasuhiro ^b  

^a TSURUOKA NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

^b NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Atmospheric; Load impedance; Network theory; On chip microplasma; Plasma conductivity

Indexed keywords

ARGON; CAPACITANCE; DIELECTRIC PROPERTIES; ELECTRIC CONDUCTIVITY; ELECTRIC IMPEDANCE; ELECTRIC NETWORK ANALYSIS; ELECTRIC REACTANCE MEASUREMENT; ELECTRIC RESISTANCE; FABRICATION; HELIUM; INDUCTANCE; MICROPROCESSOR CHIPS;

ATMOSPHERIC; LOAD IMPEDANCE; ON-CHIP MICROPLASMA; PLASMA CONDUCTIVITY;

PLASMAS;

EID: 13644281986     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.8308     Document Type: Article

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