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Journal of Electron Spectroscopy and Related Phenomena

Volumn 88-91, Issue , 1998, Pages 817-820

High-resolution XAS spectrum of interstitial nitrogen molecules in the surface oxide matrix of TiAlN film

(6) Esaka, F a Shimada, H b Imamura, M b Matsubayashi, N b Kikuchi, T c Furuya, K a

a TOKYO UNIVERSITY OF SCIENCE (Japan)

b NATL INST OF MAT AND CHEM RES (Japan)

c TOKYO UNIVERSITY OF SCIENCE (Japan)

Author keywords

Electronic interaction; Nitrogen molecule; TiAlN; XAS; XPS

Indexed keywords

EID: 13544250429 PISSN: 03682048 EISSN: None Source Type: Journal
DOI: 10.1016/s0368-2048(97)00215-6 Document Type: Article

Times cited : (16)

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