SCOPUS 정보 검색 플랫폼

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5523, Issue , 2004, Pages 110-120

A fast optical scanning deflectometer for measuring the topography of large silicon wafers

(6) Krey, Stefan a Van Amstel, Willem D b Szwedowicz, Konrad b Campos, Juan c Moreno, Alfonso c Lous, Erik J d

a Trioptics GmbH (Germany)

b PHILIPS RESEARCH LABORATORIES (Netherlands)

c UNIVERSITAT AUTÒNOMA DE BARCELONA (Spain)

d NXP SEMICONDUCTORS (Netherlands)

Author keywords

Deflectometry; Integration; Laser; Nanotopography; Scanning; Semiconductor; Slope; Topography; Wafer

Indexed keywords

ACOUSTIC NOISE; INTEGRATED CIRCUITS; INTEGRATION; LASER BEAMS; LASERS; LIQUID CRYSTAL DISPLAYS; ROBUSTNESS (CONTROL SYSTEMS); SEMICONDUCTOR DEVICES; SILICON WAFERS;

DEFLECTOMETRY; NANOTOPOGRAPHY; SLOPE; TOPOGRAPHY; WAFERS;

SCANNING;

EID: 13444263644 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.559702 Document Type: Conference Paper

Times cited : (16)

References (7)

1
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2
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- Minideflectometer for measuring optical finish quality
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3
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- Novel concept for the ultraprecise and fast measurement of the nanotopography of large wafers
- Jury 7-11, Seattle, WA
- I. Weingärtner, M. Wurm, R.D. Geckeler, C. Elster, M. Schulz, E. Dumitrescu, S. Krey, J. Heinisch, "Novel concept for the ultraprecise and fast measurement of the nanotopography of large wafers", Proceedings of The International Symposium on Optical Science and Technology, SPIE's 47th Annual Meeting, Jury 7-11, 2002, Seattle, WA.
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4
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- TRIOPTICS GmbH, Wedel Germany
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- TriAngle TA500 Electronic Autocollimator

5
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- Integration in the Fourier domain for restoration of a function from its slopes: Comparison of four methods
- J. Campos, L.P. Yaroslavsky, A. Moreno, M. J. Yzuel, "Integration in the Fourier domain for restoration of a function from its slopes: Comparison of four methods", Optics Letters Vol. 27 (2002) 1986-1988.
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- Campos, J.¹ Yaroslavsky, L.P.² Moreno, A.³ Yzuel, M.J.⁴

6
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- Frequency response of five integration methods to obtain the profile from its slope
- Submitted to
- A. Moreno, J. Campos, L. P. Yaroslavsky, "Frequency response of five integration methods to obtain the profile from its slope", Submitted to Optical Engineering.
- Optical Engineering
- Moreno, A.¹ Campos, J.² Yaroslavsky, L.P.³

7
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- Generalized wave-front reconstruction algorithm applied in a Shack-Hartmann test
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- Zou, W.¹ Zhang, Z.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.