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Volumn 4779, Issue , 2002, Pages 13-22

Novel concept for the ultraprecise and fast measurement of the nanotopography of large wafers

Author keywords

Deflectometry; Nanotopography; Scanning; Shearing; Topography; Traceabi lity; Wafer

Indexed keywords

ALGORITHMS; DIFFERENTIAL EQUATIONS; INTERFEROMETERS; LIGHT REFLECTION; NANOTECHNOLOGY; SCANNING; SEMICONDUCTOR MATERIALS; SURFACE MEASUREMENT; TRANSFER FUNCTIONS; VECTORS;

EID: 0036980287     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.451713     Document Type: Conference Paper
Times cited : (7)

References (15)
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  • 5
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    • Long Trace Profiler (LTP), Continental Optical Corporation, Hauppauge, New York.
  • 6
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    • The penta-prism LTP: A long-trace-profiler with stationary optical head and moving penta prism
    • S. Quian, W. Yark, P. Z. Takacs, "The penta-prism LTP: a long-trace-profiler with stationary optical head and moving penta prism," Rev. Sci. Instrum., 66 (1995) 2562.
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  • 7
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    • Obtaining three-dimensional height profiles from a two-dimensional slope measuring instrument
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    • Self-calibration: Reversal, redundancy, error separation, and "absolute testing"
    • C. J. Evans, R. J. Hocken, W. T. Estler, "Self-calibration: reversal, redundancy, error separation, and "absolute testing"," CIRP Annals, 45/2 (1996) 445.
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    • Recovering wavefronts from difference measurements in lateral shearing interferometry
    • C. Elster, "Recovering wavefronts from difference measurements in lateral shearing interferometry", J. Comp. and Appl. Mathematics, 110 (1999) 177.
    • (1999) J. Comp. and Appl. Mathematics , vol.110 , pp. 177
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    • Exact wave-front reconstruction from two shearing interferograms
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    • (1999) J. Opt. Soc. Am. , vol.16 , pp. 2281
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  • 15
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.