Refractive GaAs microlenses monolithically integrated with InGaAs and HgCdTe photodetectors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5074, Issue , 2003, Pages 918-925

  Piotrowski, J ^a   Mucha, H ^a   Orman, Z ^a   Pawluczyk, J ^a   Ratajczak, J ^b   Kaniewski, J ^b  

^a VIGO SYSTEM S A   (Poland)

^b ukasiewicz Research Network Institute of Microelectronics and Photonics   (Poland)

Author keywords

Microlenses; Optical immersion; Uncooled infrared photodetectors

Indexed keywords

ETCHING; INFRARED DETECTORS; MICROOPTICS; SEMICONDUCTING CADMIUM TELLURIDE; SEMICONDUCTING INDIUM GALLIUM ARSENIDE;

ION MILLING; MERCURY CADMIUM TELLURIDE; OPTICAL IMMERSION; REFRACTIVE MICROLENS; UNCOOLED INFRARED PHOTODETECTOR; WET ETCHING;

OPTICAL INSTRUMENT LENSES;

EID: 1342332015     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.511997     Document Type: Conference Paper

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