GaAs microlens arrays grown by shadow masked MOVPE

Journal of Electronic Materials

Volumn 26, Issue 10, 1997, Pages 1134-1138

  Peake, G M ^a   Sun, S Z ^a   Hersee, S D ^a  

^a NONE   (United States)

Author keywords

Microlens; Microlens array; Nonplanar metalorganic vapor phase epitaxy (MOVPE); Optical interconnect; Shadow masked metalorganic vapor phase epitaxial growth (SMMG); Shadow masked MOVPE growth

Indexed keywords

METALLORGANIC VAPOR PHASE EPITAXY; OPTICAL INTERCONNECTS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR GROWTH;

FULL WIDTH AT HALF MAXIMUM (FWHM); MICROLENS; SHADOW MASKED METALLORGANIC VAPOR PHASE EPITAXIAL (MOVPE);

LENSES;

EID: 0031257447     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-997-0009-8     Document Type: Article

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