A study on the synthesis and formation behavior of nanostructured TiN films by copper doping

Surface and Coatings Technology

Volumn 177-178, Issue , 2004, Pages 404-408

  Myung, Hyun S ^a   Han, Jeon G ^a   Boo, Jin H ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

Copper doping; Nanostructured coating; Superhard coating; Ti Cu N

Indexed keywords

COPPER; DOPING (ADDITIVES); HARDNESS; MAGNETRON SPUTTERING; TITANIUM NITRIDE;

NANOCOMPOSITE FILMS; REACTIVE ARC ION PLATING;

THIN FILMS;

COATING;

EID: 1342290055     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.09.016     Document Type: Article

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