Humidity sensing behavior of thick films of strontium-doped lead-zirconium-titanate

Surface and Coatings Technology

Volumn 179, Issue 2-3, 2004, Pages 182-187

  Ansari, Z A ^a   Ko, T G ^a   Oh, J H ^a  

^a Inha University   (South Korea)

Author keywords

PSZT; RH sensor; Schottky barrier; Thick film

Indexed keywords

LEAD ALLOYS; RESISTORS; SCANNING ELECTRON MICROSCOPY; SOL-GELS; STRONTIUM; THERMAL EFFECTS; X RAY DIFFRACTION ANALYSIS;

HUMIDITY SENSING; THICK FILM RESISTORS;

THICK FILMS;

FILM THICKNESS; SOL-GEL PROCESS;

EID: 1342287080     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00820-X     Document Type: Article

References (13)

1. Muralt P. J. Micromech. Microeng. 10 2 2000 136
2. Deng J. Zhu W. Tan O.K. Yao X. Sensors Actuators B 77 2001 416
3. Nitta T. Terada Z. Hayakawa S. J. Am. Ceram. Soc. 63 1980 386
4. Ivanov D. Caron M. Ouellet L. Blain S. Hendricks N. Curie J. J. Appl. Phys. 77 1995 2666
5. Isogai Y. Miyayama M. Yanagida H. Sensors Actuators B 30 1 1996 47
6. Robertson J. Chen C.W. Appl. Phys. Lett. 74 8 1999 1168
7. Li G.Q. Lai P.T. Huang M.Q. Zen S.H. Li B. Cheng Y.C. J. Appl. Phys. 87 2 2000 8716
8. Beeby S.P. White N.M. Sensors Actuators A 88 2001 189
9. Akedo J. Lebedev M. J. Cryst. Growth 235 2002 415
10. Ansari S.G. Ansari Z.A. Kadam M.R. Karekar R.N. Aiyer R.C. Sensors Actuators B 21 3 1994 159
11. Kulwicki B.M. J. Am. Ceram. Soc. 74 4 1991 697
12. Seiyama T. Yamazoe N. Arai H. Sensors Actuators 4 1983 85
13. Yokomizo Y. Uno S. Harata M. Hiraki H. Sensors Actuators 4 1983 599