Micromechanical analysis on residual stress-induced nanoindentation depth shifts in DLC films

Scripta Materialia

Volumn 50, Issue 9, 2004, Pages 1193-1198

  Lee, Yun Hee ^a,b   Takashima, Kazuki ^a   Kwon, Dongil ^b  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b Seoul National University   (South Korea)

Author keywords

Diamond like carbon film; Nanoindentation; Residual stresses

Indexed keywords

COMPOSITE MICROMECHANICS; ELASTIC MODULI; ELASTICITY; FABRICATION; MORPHOLOGY; PLASTIC DEFORMATION; RESIDUAL STRESSES; SHEAR STRESS; SURFACE PHENOMENA; THIN FILMS; YIELD STRESS;

MICROMECHANICAL ANALYSIS; NANOINDENTATION;

DIAMOND LIKE CARBON FILMS;

EID: 1342285576     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.scriptamat.2004.02.009     Document Type: Article

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