Evaluation of thin-film residual stress using nano-indentation combined with an atomic force microscope

International Journal of Modern Physics B

Volumn 17, Issue 8-9 I, 2003, Pages 1141-1146

  Lee, Yun Hee ^a   Kwon, Dongil ^a   Jang, Jae Il ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CONFERENCE PAPER; FILM; MATHEMATICAL ANALYSIS; MECHANICAL STRESS; NANOTECHNOLOGY; PLASTICITY; THEORETICAL MODEL;

EID: 0037763915     PISSN: 02179792     EISSN: None     Source Type: Journal    
DOI: 10.1142/s0217979203018648     Document Type: Conference Paper

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