SCOPUS 정보 검색 플랫폼

Volumn 177-178, Issue , 2004, Pages 651-656

New microwave and hollow cathode hybrid plasma sources

Author keywords

Electron cyclotron resonance; Hollow cathode; Low pressure hybrid plasma source; Radio frequency

Indexed keywords

ATMOSPHERIC PRESSURE; CATHODES; MAGNETIC FIELDS; MICROWAVES; PLASMA DENSITY; TITANIUM NITRIDE;

COLD ATMOSPHERIC PLASMAS;

PLASMA SOURCES;

COATING;

EID: 1342268121 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2003.08.059 Document Type: Article

Times cited : (19)

References (15)

1
- 84953681392
- Cuomo J.J. Rossnagel S.M. J. Vac. Sci. Technol. A4 1986 393
- (1986) J. Vac. Sci. Technol. , vol.A4 , pp. 393
- Cuomo, J.J.¹ Rossnagel, S.M.²

2
- 0018807907
- Fleischer W. Schulze D. Wilberg R. Lunk A. Thin Solid Films 63 1979 347
- (1979) Thin Solid Films , vol.63 , pp. 347
- Fleischer, W.¹ Schulze, D.² Wilberg, R.³ Lunk, A.⁴

3
- 0003420568
- Amsterdam, London, Tokyo: Elsevier
- Moisan M. Pelletier J. Microwave excited plasmas 1992 Elsevier Amsterdam, London, Tokyo
- (1992) Microwave Excited Plasmas
- Moisan, M.¹ Pelletier, J.²

4
- 0039201946
- Lončar G. Musil J. Bárdoš L. Czech. J. Phys. B30 1980 688
- (1980) Czech. J. Phys. , vol.B30 , pp. 688
- Lončar, G.¹ Musil, J.² Bárdoš, L.³

5
- 0021479595
- Ono T. Takahashi C. Matsuo S. Jpn. J. Appl. Phys. 23 1984 L534
- (1984) Jpn. J. Appl. Phys. , vol.23
- Ono, T.¹ Takahashi, C.² Matsuo, S.³

6
- 21844516082
- Lee Y.H. Chan K.K. Brady M.J. J. Vac. Sci. Technol. A13 1995 596
- (1995) J. Vac. Sci. Technol. , vol.A13 , pp. 596
- Lee, Y.H.¹ Chan, K.K.² Brady, M.J.³

7
- 1342321304
- September 2
- Y.H. Lee, U.S. Patent No. 5,453,305 September 2, 1993
- (1993) U.S. Patent No. 5,453,305
- Lee, Y.E.¹

8
- 0007527953
- October 11, 1999, PCT/SE00/02315. National filing in EU, USA and Japan
- L. Bárdoš, H. Baránková, Swedish patent No. 9904295-4, October 11, 1999, PCT/SE00/02315. National filing in EU, USA and Japan
- Swedish Patent No. 9904295-4
- Bárdoš, L.¹ Baránková, H.²

9
- 3543123011
- Baránková H. Bárdoš L. Surf. Coat. Technol. 146-147 2001 486
- (2001) Surf. Coat. Technol. , vol.146-147 , pp. 486
- Baránková, H.¹ Bárdoš, L.²

10
- 0004336382
- PCT/SE98/01983
- H. Baránková, L. Bárdoš, Swedish patent No 9704260-0, PCT/SE98/01983
- Swedish Patent No 9704260-0
- Baránková, H.¹ Bárdoš, L.²

11
- 0032620090
- Chicago, ISSN 0737-5921-Paper PE-9, Proc
- H. Baránková, L. Bárdoš: Proceedings of the 42nd Annual Technical Conference of the Society of Vacuum Coaters (SVC), Chicago 1999, ISSN 0737-5921-Paper PE-9, Proc. pp. 136-137
- (1999) Proceedings of the 42nd Annual Technical Conference of the Society of Vacuum Coaters (SVC) , pp. 136-137
- Baránková, H.¹ Bárdoš, L.²

12
- 0037472578
- Bárdoš L. Baránková H. Lebedev Y.A. Surf. Coat. Technol. 163-164 2003 654
- (2003) Surf. Coat. Technol. , vol.163-164 , pp. 654
- Bárdoš, L.¹ Baránková, H.² Lebedev, Y.A.³

13
- 0036147110
- Chou W.-J. Yu G.-P. Huang J.-H. Surf. Coat. Technol. 149 2002 7
- (2002) Surf. Coat. Technol. , vol.149 , pp. 7
- Chou, W.-J.¹ Yu, G.-P.² Huang, J.-H.³

14
- 0035881402
- Bárdoš L. Baránková H. Welzel Th Dani I. Peter S. Richter F. J. Appl. Phys. 90 2001 1703
- (2001) J. Appl. Phys. , vol.90 , pp. 1703
- Bárdoš, L.¹ Baránková, H.² Welzel, Th.³ Dani, I.⁴ Peter, S.⁵ Richter, F.⁶

15
- 0042229746
- Baránková H. Bárdoš L. Appl. Phys. Lett. 76 2000 285
- (2000) Appl. Phys. Lett. , vol.76 , pp. 285
- Baránková, H.¹ Bárdoš, L.²

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