Electron beam induced conductivity in polymethyl methacrylate, polyimide, and SiO 2 thin films

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 6, 2004, Pages 2907-2911

  Bai, Min ^a,b   Pease, Fabian ^a  

^a STANFORD UNIVERSITY   (United States)

^b SYNOPSYS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM INDUCED CONDUCTIVITY (EBIC); METAL ELECTRODES; METHACRYLATE; POLYIMIDE THIN FILMS;

ELECTRIC CONDUCTIVITY; INTERFACES (MATERIALS); IRRADIATION; MOLECULAR STRUCTURE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYIMIDES; POLYMERS; SEMICONDUCTOR MATERIALS; SILICON COMPOUNDS; THIN FILMS;

ELECTRON BEAMS;

EID: 13244288162     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1826062     Document Type: Conference Paper

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