Electron beam induced conductivity in poly(methylmethacrylate) and SiO 2 thin films

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 6, 2003, Pages 2638-2644

  Bai, Min ^a   Fabian, R ^a   Pease, W ^a   Meisburger, Dan ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM INDUCED CONDUCTIVITY (EBIC); EXTERNAL BIAS METHOD;

ABSORPTION; ADHESION; DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY; ELECTRIC FIELD EFFECTS; ELECTRODES; ELECTRON BEAMS; GOLD; IONIZATION; MOS DEVICES; OXIDATION; PHOTOCURRENTS; POLYMETHYL METHACRYLATES; SILICA; SILICON; ULTRAVIOLET RADIATION;

THIN FILMS;

EID: 0942300074     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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