Nanostructures produced by ultraviolet laser irradiation of silicon. I. Rippled structures

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 6, 2004, Pages 2823-2835

  Pedraza, A J ^a   Guan, Y F ^a   Fowlkes, J D ^a   Smith, D A ^a  

^a University of Tennessee Knoxville   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LLOYD'S MIRROR; NANORIPPLED STRUCTURES; THERMAL FIELDS; WAVE VECTORS;

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; DIFFRACTION GRATINGS; ELECTRIC FIELDS; FAST FOURIER TRANSFORMS; LASER BEAM EFFECTS; LASERS; LIGHT INTERFERENCE; MIRRORS; ONE DIMENSIONAL; PLASMA OSCILLATIONS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; SURFACE TENSION; VECTORS;

NANOSTRUCTURED MATERIALS;

EID: 13244284845     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1821575     Document Type: Article

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