Optical characterization of attenuated phase shifters

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3050, Issue , 1997, Pages 507-514

  Callegari, Alessandro ^a   Babich, Katherina ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

Absorption; Attenuated phase shift masks; Carbon film; Interferometry; Optical constants; Phase angle; Reflectance; Transmittance

Indexed keywords

ABSORPTION; AMORPHOUS CARBON; CARBON FILMS; CURVE FITTING; ERRORS; INTERFEROMETERS; INTERFEROMETRY; OPTICAL CONSTANTS; OXIDE MINERALS; PHASE SHIFT; PHASE SHIFTERS; PROCESS CONTROL; QUARTZ; REFLECTION; REFRACTIVE INDEX;

AMORPHOUS HYDROGENATED CARBON FILMS; ATTENUATED PHASE SHIFT MASKS; DIRECT PHASE MEASUREMENTS; EXPERIMENTAL ERRORS; EXTINCTION CO-EFFICIENT; INDEX N; INDEX OF REFRACTIONS; KRAMERS-KRONIG; NOISE LEVELS; OPTICAL CHARACTERIZATIONS; OPTICAL PATHS; PHASE ANGLE; PHASE ERRORS; QUARTZ SUBSTRATES; REFLECTANCE; SINGLE SCANS; TRANSMITTANCE;

OPTICAL FILMS;

EID: 12844265170     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.275940     Document Type: Conference Paper

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